Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges
Description
In this paper, attributes of chalcogenide glass (ChG) based integrated devices are discussed in detail, including origins of optical loss and processing steps used to reduce their contributions to optical component performance. Specifically, efforts to reduce loss and tailor optical characteristics of planar devices utilizing solution-based glass processing and thermal reflow techniques are presented and their results quantified. Post-fabrication trimming techniques based on the intrinsic photosensitivity of the chalcogenide glass are exploited to compensate for fabrication imperfections of ring resonators. Process parameters and implications on enhancement of device fabrication flexibility are presented.
Publication Date
1-1-2010
Publisher
figshare Academic Research System
DOI
10.6084/m9.figshare.c.3762833.v1
Document Type
Data Set
Recommended Citation
Carlie, Nathan; Zdyrko, Bogdan; Singh, Vivek; Morichetti, Francesco; Melloni, Andrea; Canciamilla, Antonio; Richardson, Kathleen; Hu, Juejun; Kimerling, Lionel C.; Musgraves, J. David; Agarwal, Anu; Luzinov, Igor (2010), "Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges", figshare Academic Research System, doi: 10.6084/m9.figshare.c.3762833.v1
https://doi.org/10.6084/m9.figshare.c.3762833.v1
Identifier
10.6084/m9.figshare.c.3762833.v1
Embargo Date
1-1-2010