Document Type

Patent

Publication Date

10-19-2010

Patent Number

patent number 7818816

Abstract

Disclosed are methods and devices for patterning micro- and/or nano-sized pattern elements on a substrate using field emitted electrons from an element. Disclosed methods and devices can also be utilized to form nano- and micron-sized depressions in a substrate according to a more economical process than as has been utilized in the past. Methods include single-step methods by which structures can be simultaneously created and located at desired locations on a substrate. Methods include the application of a bias voltage between a probe tip and a substrate held at a relatively close gap distance. The applied voltage can promote current flow between the probe and the substrate via field emissions. During a voltage pulse, and within predetermined energy levels and tip-to-surface gap distances, three dimensional formations can be developed on the substrate surface.

Application Number

12/243402

Assignees

Clemson University Research Foundation (Anderson, SC, US)

Filing Date

2008-10-01

Primary/U.S. Class

850/1

Other/U.S. Class

73/105, 250/306, 250/310, 850/5, 850/33

Share

COinS