Document Type

Patent

Publication Date

4-9-1991

Patent Number

patent number 5006706

Abstract

A method and apparatus for analyzing solid sample materials is provided wherein a low pressure glow discharge is initiated by applying a radio frequency potential to an integral, continuous sample cathode and an electrically grounded anode in the presence of an inert gas, the glow discharge being maintained such that the inert gas is ionized and the ionized gas sputters sample material, the sputtered sample material then passing into an analyzer region for analysis.

Application Number

07/359157

Assignees

Clemson University (Clemson, SC)

Filing Date

1989-05-31

Primary/U.S. Class

250/288

Other/U.S. Class

250/281, 250/282, 250/423R

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