Date of Award
5-2004
Document Type
Dissertation
Degree Name
Doctor of Philosophy (PhD)
Legacy Department
Electrical and Computer Engineering
Recommended Citation
Damjanovic, Daniel, "In-situ Fabrication of Metal Gate/High-Dielectric Constant Gate Dielectric Stacks for the sub-90 nm CMOS Technology Node" (2004). Archived Dissertations. 1407.
https://open.clemson.edu/arv_dissertations/1407
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